JPH01156741U - - Google Patents
Info
- Publication number
- JPH01156741U JPH01156741U JP5150788U JP5150788U JPH01156741U JP H01156741 U JPH01156741 U JP H01156741U JP 5150788 U JP5150788 U JP 5150788U JP 5150788 U JP5150788 U JP 5150788U JP H01156741 U JPH01156741 U JP H01156741U
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- tank
- material gas
- supply device
- gas supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002994 raw material Substances 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 2
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5150788U JPH01156741U (en]) | 1988-04-19 | 1988-04-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5150788U JPH01156741U (en]) | 1988-04-19 | 1988-04-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01156741U true JPH01156741U (en]) | 1989-10-27 |
Family
ID=31277528
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5150788U Pending JPH01156741U (en]) | 1988-04-19 | 1988-04-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01156741U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021150472A (ja) * | 2020-03-19 | 2021-09-27 | 株式会社Kokusai Electric | 気化装置、基板処理装置、クリーニング方法および半導体装置の製造方法 |
-
1988
- 1988-04-19 JP JP5150788U patent/JPH01156741U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021150472A (ja) * | 2020-03-19 | 2021-09-27 | 株式会社Kokusai Electric | 気化装置、基板処理装置、クリーニング方法および半導体装置の製造方法 |